Semiconductor Fabrication

 

The Micro Electronic Lab is designed as a purpose built Centre for Applied Microelectronics. This lab serves as a unique resource by advancing our expertise in the area of semiconductor electronics and nanotechnology. A primary objective of the Microelectronics Laboratory is to act as an educational resource to train technicians, engineers, scientists and researchers in this strategic area of microelectronic nanotechnology. The Microelectronics Centre is constructed to an extremely high standard and is a completely independent, fully integrated plant with its own waste disposal and utilities systems.

Supporting state of the art education and training, the 125.5 m2 facility is comprised of a Class 10,000 laboratory area, a Class 1000 lithographic area, a furnace room and a gowning area. In addition to wet chemical benches, the Centre is equipped with a 3-stack furnace, an advanced evaporation/sputtering unit, a mask alignment system, an ellipsometer, an RF probe station and many other pieces of analytical apparatus. The laboratory is also furnished with a suite of software tools allowing simulation of the complete fabrication process. In addition students have access to a Scanning Electron Microscope with EDX facility, located in a Science research area which is used for physical characterisation.

Semiconductor Lab
Semiconductor Lab
 
Semiconductor Lab
Semiconductor Lab
 
Semiconductor Lab
Semiconductor Lab
 
  • European Union Structural Funds
  • Synergy Centre at ITTEngineering Dublin
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